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https://hdl.handle.net/20.500.14279/1624| Τίτλος: | Conducting transition metal nitride thin films with tailored cell sizes: the case of δ-TixTa1−xN | Συγγραφείς: | Abadias, Gregory Lekka, Christina E. Koutsokeras, Loukas E. |
Major Field of Science: | Engineering and Technology | Field Category: | Electrical Engineering - Electronic Engineering - Information Engineering | Λέξεις-κλειδιά: | Cells--Growth;Liquid phase epitaxy;Metals;Nitrides;Tantalum;Molecular beam epitaxy | Ημερομηνία Έκδοσης: | 2008 | Πηγή: | Applied physics letters, 2008, vol. 93, iss. 1, pp. 1-3 | Volume: | 93 | Issue: | 1 | Start page: | 1 | End page: | 3 | Περιοδικό: | Applied Physics Letters | Περίληψη: | We present results on the stability and tailoring of the cell size of conducting δ- Tix Ta1-x N obtained by film growth and ab initio calculations. Despite the limited solubility of Ta in Ti, we show that TiN and TaN are soluble due to the hybrization of the d and sp electrons of the metal and N, respectively, that stabilizes the ternary system to the rocksalt structure. The stress-free cell sizes follow the Vegard's rule; nevertheless, process-dependent stresses expand the cell size of the as-grown films. The electronic properties of δ- Tix Ta1-x N films (ρ =180 cm) are similar to those of TiN and TaN | URI: | https://hdl.handle.net/20.500.14279/1624 | ISSN: | 10773118 | DOI: | 10.1063/1.2955838 | Rights: | © American Institute of Physics | Type: | Article | Affiliation: | University of Ioannina | Affiliation: | University of Ioannina Université de Poitiers |
| Εμφανίζεται στις συλλογές: | Άρθρα/Articles |
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