Université de Poitiers

Organization name
Université de Poitiers


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Issue DateTitleAuthor(s)
12009Stress evolution in magnetron sputtered Ti–Zr–N and Ti–Ta–N films studied by in situ wafer curvature: role of energetic particlesAbadias, Gregory ; Koutsokeras, Loukas E. ; Guerin, Philippe ; Patsalas, Panos A.