Please use this identifier to cite or link to this item:
https://hdl.handle.net/20.500.14279/1624
Title: | Conducting transition metal nitride thin films with tailored cell sizes: the case of δ-TixTa1−xN |
Authors: | Abadias, Gregory Lekka, Christina E. Koutsokeras, Loukas E. |
Major Field of Science: | Engineering and Technology |
Field Category: | Electrical Engineering - Electronic Engineering - Information Engineering |
Keywords: | Cells--Growth;Liquid phase epitaxy;Metals;Nitrides;Tantalum;Molecular beam epitaxy |
Issue Date: | 2008 |
Source: | Applied physics letters, 2008, vol. 93, iss. 1, pp. 1-3 |
Volume: | 93 |
Issue: | 1 |
Start page: | 1 |
End page: | 3 |
Journal: | Applied Physics Letters |
Abstract: | We present results on the stability and tailoring of the cell size of conducting δ- Tix Ta1-x N obtained by film growth and ab initio calculations. Despite the limited solubility of Ta in Ti, we show that TiN and TaN are soluble due to the hybrization of the d and sp electrons of the metal and N, respectively, that stabilizes the ternary system to the rocksalt structure. The stress-free cell sizes follow the Vegard's rule; nevertheless, process-dependent stresses expand the cell size of the as-grown films. The electronic properties of δ- Tix Ta1-x N films (ρ =180 cm) are similar to those of TiN and TaN |
URI: | https://hdl.handle.net/20.500.14279/1624 |
ISSN: | 10773118 |
DOI: | 10.1063/1.2955838 |
Rights: | © American Institute of Physics |
Type: | Article |
Affiliation: | University of Ioannina |
Affiliation : | University of Ioannina Université de Poitiers |
Publication Type: | Peer Reviewed |
Appears in Collections: | Άρθρα/Articles |
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