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https://hdl.handle.net/20.500.14279/1583
Τίτλος: | Texture and microstructure evolution in single-phase TixTa 1-xN alloys of rocksalt structure | Συγγραφείς: | Abadias, Gregory Patsalas, Panos Koutsokeras, Loukas E. |
Major Field of Science: | Engineering and Technology | Field Category: | Chemical Engineering | Λέξεις-κλειδιά: | Titanium nitride;Magnetron sputtering;Ion plating | Ημερομηνία Έκδοσης: | 15-Αυγ-2011 | Πηγή: | Journal of applied physics, 2011, vol. 110, no. 4, pp. 1-5 | Volume: | 110 | Issue: | 4 | Start page: | 1 | End page: | 5 | Περιοδικό: | Journal of Applied Physics | Περίληψη: | The mechanisms controlling the structural and morphological features (texture and microstructure) of ternary transition metal nitride thin films of the TixTa1-xN system, grown by various physical vapor deposition techniques, are reported. Films deposited by pulsed laser deposition, dual cathode magnetron sputtering, and dual ion beam sputtering have been investigated by means of x-ray diffraction in various geometries and scanning electron microscopy. We studied the effects of composition, energetic, and kinetics in the evolution of the microstructure and texture of the films. We obtain films with single and mixed texture as well as films with columnar zone-T and globular type morphology. The results have shown that the texture evolution of ternary transition metal nitrides as well as the microstructural features of such films can be well understood in the framework of the kinetic mechanisms proposed for their binary counterparts, thus giving these mechanisms a global application | URI: | https://hdl.handle.net/20.500.14279/1583 | ISSN: | 10897550 | DOI: | 10.1063/1.3622585 | Rights: | © American Institute of Physics | Type: | Article | Affiliation: | University of Ioannina | Affiliation: | CNRS-Université de Poitiers-ENSMA University of Ioannina |
Publication Type: | Peer Reviewed |
Εμφανίζεται στις συλλογές: | Άρθρα/Articles |
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