Journal of Vacuum Science and Technology B
Name
Journal of Vacuum Science and Technology B
Subjects
2-D materials
Compound semiconductor electronics and optoelectronics
Dielectrics in micro- and nanoelectronics
Graphene, carbon nanotubes, and fullerenes: materials & devices
Group IV semiconductor microelectronics
Lithography
Microelectromechanical and nanoelectromechanical systems and devices
Nanometer science and nanotechnology
Nanostructured materials and devices including nanowires, nanoparticles and quantum dots, and organic and molecular electronics
Photovoltaics, batteries, and other devices for energy conversion and storage
Photovoltaics, batteries, and other devices for energy conversion and storage
Spintronics and magnetic devices
Vacuum Measurement and Technology
ISSN
1071-1023
Impact Factor (2 years)
1.351
Publisher
American Institute of Physics
Journal type
subscription
Journal Webpage