Journal of Vacuum Science & Technology A

Name

Subjects

Fundamental surface science

Atomic layer deposition

Photovoltaics

Plasma science and technology

Surface engineering

Thin film deposition

Transmission electron microscopy

Tribology JVSTA - Jo

ISSN

0734-2101

Impact Factor (2 years)

1.833

Publisher

American Institute of Physics

Journal type

subscription

Journal Webpage