Photomodulated thermoreflectance detection of hydrogen gas using optically thin palladium film on silicon oxide
Journal
Review of Scientific Instruments
Date Issued
October 21, 1998
DOI
10.1063/1.1148787
Abstract
The sensitivity of various thicknesses of optically thin film palladium layers evaporated onto silicon oxide substrate is investigated in the presence of a hydrogen/air atmosphere at room temperature. The magnitude of the resulting reflectivity change is measured using an excite-probe technique, through laser excited photothermal modulation of a probe beam. This allows for the recovery of information from both the amplitude and phase channels of the hydrogen sensor output. Data indicates that concentrations of 0.1% hydrogen in the presence of a balanced air mixture and at room temperature may be measured with an 8 nm palladium film. The presence of inhomogeneities in the palladium layers leads to anomalous behavior.