Browsing by Subject inductively coupled plasma and reactive ion etching

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Issue DateTitleAuthor(s)
1-Jan-2025Trench Etch Processing for SiC Superjunction Schottky DiodesCao, Qinze ; Renz, Arne Benjamin ; Gammon, Peter M. ; Lophitis, Neophytos ; Melnyk, Kyrylo ; Antoniou, Marina