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Publisher:  American Institute of Physics

Results 1-1 of 1 (Search time: 0.0 seconds).

Issue DateTitleAuthor(s)
13-May-2012Intrinsic Stress in ZrN Thin Films: Evaluation of Grain Boundary Contribution From in Situ Wafer Curvature and Ex Situ x-ray Diffraction TechniquesAbadias, Gregory ; Koutsokeras, Loukas E.