Kharkiv Institute of Physics and Technology

Organization name
Kharkiv Institute of Physics and Technology


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Issue DateTitleAuthor(s)Journal
1Jul-2010Reactive magnetron cosputtering of hard and conductive ternary nitride thin films: Ti–Zr–N and Ti–Ta–NAbadias, Gregory ; Dub, Sergey N. ; Koutsokeras, Loukas E. Journal of Vacuum Science & Technology A