CEMHTI

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CEMHTI

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		Issue Date	Title	Author(s)	Journal
	1	Jul-2010	Reactive magnetron cosputtering of hard and conductive ternary nitride thin films: Ti–Zr–N and Ti–Ta–N	Abadias, Gregory ; Dub, Sergey N. ; Koutsokeras, Loukas E.	Journal of Vacuum Science & Technology A