Journal of Vacuum Science and Technology B - (:unkn) unknown (American Institute of Physics, 2026)
Keywords: 2-D materials; Compound semiconductor electronics and optoelectronics; Dielectrics in micro- and nanoelectronics; Graphene, carbon nanotubes, and fullerenes: materials & devices; Group IV semiconductor microelectronics; Lithography; Microelectromechanical and nanoelectromechanical systems and devices; Nanometer science and nanotechnology; Nanostructured materials and devices including nanowires, nanoparticles and quantum dots, and organic and molecular electronics; Photovoltaics, batteries, and other devices for energy conversion and storage; Photovoltaics, batteries, and other devices for energy conversion and storage; Spintronics and magnetic devices; Vacuum Measurement and Technology