Please use this identifier to cite or link to this item: https://ktisis.cut.ac.cy/handle/10488/7317
DC FieldValueLanguage
dc.contributor.authorAbadias, Gregory-
dc.contributor.authorPatsalas, Panos-
dc.contributor.authorKoutsokeras, Loukas E.-
dc.date.accessioned2013-02-21T13:44:48Zen
dc.date.accessioned2013-05-17T05:22:25Z-
dc.date.accessioned2015-12-02T10:01:01Z-
dc.date.available2013-02-21T13:44:48Zen
dc.date.available2013-05-17T05:22:25Z-
dc.date.available2015-12-02T10:01:01Z-
dc.date.issued2011-08-15-
dc.identifier.citationJournal of applied physics, 2011, vol. 110, no. 4, pp. 1-5en_US
dc.identifier.issn1089-7550-
dc.description.abstractThe mechanisms controlling the structural and morphological features (texture and microstructure) of ternary transition metal nitride thin films of the TixTa1-xN system, grown by various physical vapor deposition techniques, are reported. Films deposited by pulsed laser deposition, dual cathode magnetron sputtering, and dual ion beam sputtering have been investigated by means of x-ray diffraction in various geometries and scanning electron microscopy. We studied the effects of composition, energetic, and kinetics in the evolution of the microstructure and texture of the films. We obtain films with single and mixed texture as well as films with columnar zone-T and globular type morphology. The results have shown that the texture evolution of ternary transition metal nitrides as well as the microstructural features of such films can be well understood in the framework of the kinetic mechanisms proposed for their binary counterparts, thus giving these mechanisms a global applicationen_US
dc.language.isoenen_US
dc.publisherAmerican Institute of Physicsen
dc.relation.ispartofJournal of Applied Physicsen_US
dc.rights© American Institute of Physicsen_US
dc.subjectTitanium nitrideen_US
dc.subjectMagnetron sputteringen_US
dc.subjectIon platingen_US
dc.titleTexture and microstructure evolution in single-phase TixTa 1-xN alloys of rocksalt structureen_US
dc.typeArticleen_US
dc.affiliationUniversity of Ioanninaen
dc.collaborationCNRS-Université de Poitiers-ENSMAen_US
dc.collaborationUniversity of Ioanninaen_US
dc.subject.categoryChemical Engineeringen_US
dc.journalsSubscriptionen_US
dc.countryFranceen_US
dc.countryGreeceen_US
dc.subject.fieldEngineering and Technologyen_US
dc.publicationPeer Revieweden_US
dc.identifier.doi10.1063/1.3622585en_US
dc.dept.handle123456789/54en
dc.relation.issue4en_US
dc.relation.volume110en_US
cut.common.academicyear2011-2012en_US
dc.identifier.spage1en_US
dc.identifier.epage5en_US
item.cerifentitytypePublications-
item.fulltextNo Fulltext-
item.grantfulltextnone-
item.languageiso639-1en-
item.openairecristypehttp://purl.org/coar/resource_type/c_6501-
item.openairetypearticle-
crisitem.journal.journalissn1089-7550-
crisitem.journal.publisherAmerican Institute of Physics-
crisitem.author.deptDepartment of Mechanical Engineering and Materials Science and Engineering-
crisitem.author.facultyFaculty of Engineering and Technology-
crisitem.author.orcid0000-0003-4143-0085-
crisitem.author.parentorgFaculty of Engineering and Technology-
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