Publications



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Journal:  Journal of Vacuum Science & Technology A

Results 1-1 of 1 (Search time: 0.0 seconds).

Issue DateTitleAuthor(s)
1Jul-2010Reactive magnetron cosputtering of hard and conductive ternary nitride thin films: Ti–Zr–N and Ti–Ta–NAbadias, Gregory ; Dub, Sergey N. ; Koutsokeras, Loukas E.