Journals Journal of Vacuum Science & Technology A

Name
Journal of Vacuum Science & Technology A
Alternative title
JVSTA
Subjects
Fundamental surface science
Atomic layer deposition
Photovoltaics
Plasma science and technology
Surface engineering
Thin film deposition
Transmission electron microscopy
Tribology JVSTA - Jo
ISSN
0734-2101
Description
JVSTA is devoted to publishing reports of original research, letters, and review articles on interfaces and surfaces of materials, thin films, and plasmas. JVSTA publishes reports that advance the fundamental understanding of interfaces and surfaces at a fundamental level and that use this understanding to advance the state of the art in various technological applications.
Impact Factor (2 years)
1.833
Publisher
American Institute of Physics
Journal type
Subscription Journal

Journals Publications
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Issue DateTitleAuthor(s)
1Jul-2010Reactive magnetron cosputtering of hard and conductive ternary nitride thin films: Ti–Zr–N and Ti–Ta–NAbadias, Gregory ; Dub, Sergey N. ; Koutsokeras, Loukas E.