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Title: Theoretical investigation of the equilibrium surface structure of si1-x-ygexcy alloys
Authors: Kelires, Pantelis C. 
Keywords: Alloys
Monte Carlo method
Computer simulation
Issue Date: 1998
Publisher: Elsevier
Source: Surface Science,1998, Volume 418, Issue 2,Pages L62-L67
Abstract: We investigate the surface structure of SiGeC alloys at typical growth temperatures using Monte Carlo simulations within the empirical potential formalism. We find a strong tendency of carbon to segregate to the top layer. As a consequence, germanium segregation is drastically reduced. The carbon composition profile oscillates in the subsurface layers, with a marked enhancement in the third layer. Si-C dimers are the favored surface bonding geometry, and are mostly found in (2 × 2) and c(4 × 2) arrangements.
ISSN: 0039-6028
DOI: 10.1016/S0039-6028(98)00758-4
Rights: © 1998 Elsevier Science B.V. All rights reserved.
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