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Title: Texture and microstructure evolution in single-phase TixTa 1-xN alloys of rocksalt structure
Authors: Abadias, Gregory
Patsalas, Panos 
Koutsokeras, Loukas E. 
Keywords: Microstructure;Transition metals;Titanium nitride;Pulsed laser deposition;Scanning electron microscopy;Tantalum
Issue Date: 2011
Publisher: American Institute of Physics
Source: Journal of applied physics, 2011, Volume 110, Issue 4, Pages 1-5
Abstract: The mechanisms controlling the structural and morphological features (texture and microstructure) of ternary transition metal nitride thin films of the TixTa1-xN system, grown by various physical vapor deposition techniques, are reported. Films deposited by pulsed laser deposition, dual cathode magnetron sputtering, and dual ion beam sputtering have been investigated by means of x-ray diffraction in various geometries and scanning electron microscopy. We studied the effects of composition, energetic, and kinetics in the evolution of the microstructure and texture of the films. We obtain films with single and mixed texture as well as films with columnar zone-T and globular type morphology. The results have shown that the texture evolution of ternary transition metal nitrides as well as the microstructural features of such films can be well understood in the framework of the kinetic mechanisms proposed for their binary counterparts, thus giving these mechanisms a global application
ISSN: 00218979
DOI: 10.1063/1.3622585
Rights: © 2011 American Institute of Physics
Type: Article
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